JPH0334233U - - Google Patents
Info
- Publication number
- JPH0334233U JPH0334233U JP9389189U JP9389189U JPH0334233U JP H0334233 U JPH0334233 U JP H0334233U JP 9389189 U JP9389189 U JP 9389189U JP 9389189 U JP9389189 U JP 9389189U JP H0334233 U JPH0334233 U JP H0334233U
- Authority
- JP
- Japan
- Prior art keywords
- control section
- focusing
- wafer
- detection beam
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 238000004033 diameter control Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389189U JPH0334233U (en]) | 1989-08-11 | 1989-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9389189U JPH0334233U (en]) | 1989-08-11 | 1989-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334233U true JPH0334233U (en]) | 1991-04-04 |
Family
ID=31643251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9389189U Pending JPH0334233U (en]) | 1989-08-11 | 1989-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334233U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005237643A (ja) * | 2004-02-26 | 2005-09-08 | Taiyo Parts Kk | 昇降装置 |
| JP2007125419A (ja) * | 2007-01-11 | 2007-05-24 | Takara Standard Co Ltd | 昇降収納ラックの収納装置 |
-
1989
- 1989-08-11 JP JP9389189U patent/JPH0334233U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005237643A (ja) * | 2004-02-26 | 2005-09-08 | Taiyo Parts Kk | 昇降装置 |
| JP2007125419A (ja) * | 2007-01-11 | 2007-05-24 | Takara Standard Co Ltd | 昇降収納ラックの収納装置 |
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